Spring of 2024 – Materials Science 223 “Materials Science of Thin Films”
Lecture, four hours; discussion, one hour; outside study, seven hours. Requisites: courses 120, 131. Fabrication, structure, and property correlations of thin films used in microelectronics for data and information processing. Topics include film deposition, interfacial properties, stress and strain, electromigration, phase changes and kinetics, reliability. Letter grading. Book: The Materials Science of Thin Films, Milton Ohring, Academic Press 1991
